This device is a three-target magnetic control coating instrument, which can be used for the preparation of metal film, in the field of electronics, optics, special ceramic preparation and other fields, and can also be used for laboratory SEM sample preparation.

The equipment is equipped with three magnetic-controlled targets and two sets of DC power supplies, which can be used for plating multi-layer conductive metal films. At the same time, the equipment has two parts: a main chamber and a transition chamber. The transition chamber is equipped with a magnetic push rod and a vacuum gate valve is installed between the two chambers.

 The user can load the sample in the transition chamber while sputtering in the main chamber, and carry out vacuum pre-pumping. After the sputtering in the main chamber is completed, the sample can be pushed through the magnetic push rod to the sample table in the main chamber. This design can reduce the number of vacuum extraction in the main chamber, which can not only effectively save time, but also ensure better local vacuum and effectively improve the coating quality.