Embedded Files
Three-source evaporation coater with glove box
Three-source evaporation coater with glove box
Coating equipment with metal/organic source evaporation as the main body, suitable for laboratory preparation of metal elements, oxides, dielectrics, semiconductor films, etc., can also be used for teaching and production line early process test, etc. The whole set of equipment is simple to operate, comprehensive functions, large expansion space, suitable for and meet the teaching and scientific research work of colleges and universities.
Description
Description
The coating equipment is composed of vacuum chamber chamber, metal/organic source system, sample table system, vacuum pump unit, film thickness detection system, equipment frame, electric control system. The front door of the vacuum chamber can be connected with the glove box. The integrated design scheme is adopted, and the whole equipment is compact in structure and simple in layout to avoid the appearance of the experimental equipment.
Technical Parameters
Technical Parameters
Page updated
Google Sites
Report abuse