This equipment is a three-source high vacuum evaporation coater, the equipment adopts the front door type vacuum chamber design, the chamber space is large, strong scalability, can meet the evaporation coating of multiple large size samples. The chamber is equipped with an upper sample table, which can be used to select clamped or cassette sample mounting parts according to the user's sample style. 

The sample table can be rotated, water-cooled, and all operations are integrated through the touch screen control. The vacuum pump group of the equipment is a two-stage vacuum system, which is composed of a bipolar rotary vane vacuum pump and a turbomolecular pump, which can provide a clean and oil-free high vacuum environment for vacuum coating test. The vacuum system contains a complete pneumatic valve system, and users can perform one-click operation through the touch screen to achieve vacuum extraction, non-stop lofting, complete shutdown and other operations.

Tri-source High vacuum evaporation coaters are used in the manufacture of metal and dielectric films, thin film sensors, optical components, nano and micro electronics, solar cells.