The bottom targeting design can effectively ensure the purity of the thin film,for possible contamination of the sample caused by contaminant shedding after contamination of the target gun.
Magnetron sputtering coater is an advanced physical vapor deposition equipment, which is widely used in semiconductor, optoelectronics, display technology and surface engineering. The device uses magnetron sputtering technology to enhance the ionization efficiency through magnetic fields, thus achieving high-quality and uniform film deposition.
Product Features:
High efficiency coating: magnetron sputtering technology, high deposition rate, good film uniformity.
Multifunctional applications: Support a variety of targets and substrates, suitable for thin film deposition of different materials.
Intelligent control: Equipped with advanced control system to achieve accurate process parameter control.
Modular design: easy to maintain and upgrade, can be customized according to the needs of various functional modules.
Environmentally friendly: Low energy design to reduce the impact on the environment.